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CMP of Speciality Metals and Alloys

Leveraging 450 plus patents on Chemical Mechanical Planarization (CMP), slurries and pads, Surface Finishes provides nanoscale surface roughness, improved surface purity and cleanliness and low subsurface damage on specialty metals and alloys.

Materials such as:

  • Aluminum
  • Precision MirrorsCopper
  • Glidcop
  • Molybdenum
  • Niobium
  • Silicon
  • Stainless Steel
  • Tantalum
  • Titanium
  • Tungsten
  • Other

Applications such as:

  • Mirrors,Targets and Substrates
  • SRF Cavities
  • Air Bearings
  • High Energy Research
  • Vacuum Chambers
  • Other

 

CMP Mechanism of Specialty Metals and Alloys

CMP Process Mechanism

  

Please contact our team for more information.